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Title:
METHOD OF MANUFACTURING ANTIREFLECTION FILM, AND ANTIREFLECTION FILM AND OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JP2010204394
Kind Code:
A
Abstract:

To provide a method of efficiently manufacturing an antireflection film provided with a low refractive index silica aerogel film which has excellent scratch resistance and little variation of a refractive index, the antireflection film formed by the method, and an optical element provided with the antireflection film.

In the method of manufacturing the antireflection film provided with at least one layer of the silica aerogel film, the silica aerogel film is formed by applying mixed sol composed by mixing first acid sol of a median diameter ≤100 nm obtained by adding an acidic solution further to alkaline sol prepared by executing the hydrolysis and condensation polymerization of alkoxysilane under a basic catalyst and second acid sol of the median diameter ≤10 nm obtained by executing the hydrolysis and condensation polymerization of the alkoxysilane under an acid catalyst onto a substrate, drying it, and then executing humidity treatment of preserving it in the environment of the temperature ≥35°C and the relative humidity ≥70% for at least one hour. Also, the antireflection film obtained by the method of manufacturing it and the optical element are disclosed.


Inventors:
SUZUKI MINEHIRO
YAMADA KAZUHIRO
NAKAYAMA HIROYUKI
FUJII HIDEO
KIKUCHI SEIJI
TAMADA TAKEAKI
Application Number:
JP2009049938A
Publication Date:
September 16, 2010
Filing Date:
March 03, 2009
Export Citation:
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Assignee:
HOYA CORP
International Classes:
G02B1/10; G02B1/11; G02B1/111
Domestic Patent References:
JP2009075583A2009-04-09
JP2006151800A2006-06-15
JP2006215542A2006-08-17
JP2007052345A2007-03-01
JP2003535804A2003-12-02
JP2006096019A2006-04-13
JP2003535804A2003-12-02
JP2006096019A2006-04-13
JP2006227596A2006-08-31
JP2005221911A2005-08-18
JP2009075583A2009-04-09
JP2006151800A2006-06-15
JP2006215542A2006-08-17
JP2007052345A2007-03-01
Other References:
JPN6013008329; JUE WANG等: '"Scratch-Resistant Improvement of Sol-Gel Derived Nano-Porous Silica Films"' Journal of Sol-Gel Science and Technology 第18巻, 2000, 第219-224ページ
Attorney, Agent or Firm:
Takaishi Tachibana



 
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