Title:
METHOD FOR MANUFACTURING CARBON NANOTUBE ON OFF SUBSTRATE
Document Type and Number:
Japanese Patent JP3810357
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing carbon nanotubes where the growing location, diameter, orientation and chirality are controlled.
SOLUTION: The method for manufacturing carbon nanotubes includes the processes of: preparing a substrate tilted in a one-dimensional or two-dimensional direction from a specified crystallographic orientation with high symmetry; vapor-depositing a catalyst metal along the atomic steps appearing on the substrate surface; and growing carbon nanotubes by chemical vapor deposition (CVD) on the catalyst metal as nuclei.
Inventors:
Yuji Awano
Application Number:
JP2002235015A
Publication Date:
August 16, 2006
Filing Date:
August 12, 2002
Export Citation:
Assignee:
富士通株式会社
International Classes:
C01B31/02; C23C16/26; C30B29/62; C30B29/66; H01L21/02; H01L21/205; H01L29/06; (IPC1-7): C01B31/02; C23C16/26; C30B29/62; C30B29/66; H01L21/02; H01L21/205; H01L29/06
Attorney, Agent or Firm:
Takashi Ishida
Yoshio Yoshio
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji
Yoshio Yoshio
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji
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