To provide a method of manufacturing a ceramic heater preventing delamination between a first heater substrate and a second heater substrate.
The ceramic heater 1 has a heating part 13, the first heater substrate 11, and the second heater substrate 12. Conductive paste 813 to form the heating part 13 is printed on the outer surface of a first sheet 811 for forming the first substrate 11. Ceramic paste 814 made of the same ceramic component as that of the first sheet 811 is applied to the outer surface on the side of the first sheet 811 where the conductor paste 813 is disposed. A second sheet 812 for forming the second heater substrate 12 is laminated on the outer surface of the side opposite to the side of the ceramic paste 814 where the first sheet 811 is disposed. Density of the first sheet 811 and the second sheet 812 is 2.53-2.7 g/cm3, density of the ceramic paste 814 is 2.49-2.6 g/cm3.
MURAI ATSUSHI
IMAGAWA HIROKATSU
JP2006222068A | 2006-08-24 | |||
JP2001102152A | 2001-04-13 | |||
JP2001102156A | 2001-04-13 | |||
JPH1167426A | 1999-03-09 |
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