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Title:
METHOD OF MANUFACTURING FIBER CONTAINING CARBON, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE WITH A PLURALITY OF FIBERS CONTAINING CARBON, ARRANGED ON SUBSTRATE
Document Type and Number:
Japanese Patent JP2005169554
Kind Code:
A
Abstract:

To provide a method of manufacturing an image forming device, capable of manufacturing an electron source substrate stably without characteristic dispersion and manufacturing the image forming device with excellent display quality over a long period of time, at low cost.

The method of manufacturing the electronic device has a first process for forming a first electrode with a catalyst layer on the surface, and a second electrode without a catalyst layer on the surface, on the substrate, and a second process for growing the fibers containing carbon, on the substrate by heating the substrate in the state of bringing gas containing carbon, into contact with the catalyst layer. In the second process, the length of the fibers containing carbon is measured, and the growth quantity of the fibers containing carbon is controlled based on the measured result.


Inventors:
MIYAZAKI KAZUYA
KUBOTA OICHI
SATO TAKAHIRO
Application Number:
JP2003412010A
Publication Date:
June 30, 2005
Filing Date:
December 10, 2003
Export Citation:
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Assignee:
CANON KK
International Classes:
B82B3/00; C01B31/02; D01F9/127; H01J1/304; H01J9/02; H01J31/12; (IPC1-7): B82B3/00; C01B31/02; D01F9/127; H01J1/304; H01J9/02; H01J31/12
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio