Title:
METHOD OF MANUFACTURING FUNCTIONAL DEVICE, THE FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING BODY
Document Type and Number:
Japanese Patent JP2015161641
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional device having high a Q value and high stability, the functional device manufactured by the manufacturing method, and an electronic apparatus and a moving body equipped with the functional device.SOLUTION: A method of manufacturing a functional device 100 includes: a step for preparing a sealing member 40 and a package 50 in which a housing space 52 is provided and a functional element 20 having a movable body is housed in the housing space 52 and which has a through-hole 32; a melting step for melting the sealing member 40a under a reduced-pressure atmosphere; and a sealing step for arranging the sealing member 40a melted in the melting step in the through-hole 32 and melting the sealing member 40a under the reduced-pressure atmosphere.
Inventors:
TAKIZAWA TERUO
Application Number:
JP2014038174A
Publication Date:
September 07, 2015
Filing Date:
February 28, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5769; B81B3/00; B81C3/00; G01P15/08; H01L29/84
Domestic Patent References:
| JPH11340348A | 1999-12-10 | |||
| JP2013098609A | 2013-05-20 |
Foreign References:
| US20100072862A1 | 2010-03-25 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe