Title:
METHOD OF MANUFACTURING INKJET RECORDER
Document Type and Number:
Japanese Patent JP3666506
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To form a piezoelectric element for an inkjet recorder capable of being fabricated into a multi-elemental one, which is a low-voltage type and has a good ink discharge capacity by forming a thin film of a lead dielectric such as a PZT and by finely fabricating them while retaining high piezoelectric characteristics by using a thin film forming process.
SOLUTION: The method of manufacturing an inkjet recorder involves a preparation of a piezoelectric element 3 using a PZT thin film formed by an rf sputtering method and a formation of a thin film diaphragm 4 on the top wall of a pressure chamber 1.
Inventors:
Kamino Isaku
Satoru Fujii
Ryoichi Takayama
Ken Kamada
Satoru Fujii
Ryoichi Takayama
Ken Kamada
Application Number:
JP2004184743A
Publication Date:
June 29, 2005
Filing Date:
June 23, 2004
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B41J2/16; (IPC1-7): B41J2/16
Domestic Patent References:
| JP10081016A |
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito