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Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MAGNETIC HEAD, AND PHOTO-MASK
Document Type and Number:
Japanese Patent JP2010086604
Kind Code:
A
Abstract:

To provide a photomask for easily and preciously controlling the tilt angle of the wall surface of a groove on photoresist film and a method for manufacturing a magnetic head using the same.

The photomask 10 has a structure in which a half-transparent film 12 is provided at a plane side of one side of a transparent substrate 11. The half-transparent film 12 includes an aperture part 12a with width corresponding to a main magnetic pole of the magnetic head. Width of the aperture part 12a is made shorter than wavelength of light used during exposure, and light transmittance of the half-transparent film 12 is determined in accordance with the tilt angle of the side of the main magnetic pole.


Inventors:
SUDA SHOICHI
Application Number:
JP2008254606A
Publication Date:
April 15, 2010
Filing Date:
September 30, 2008
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G11B5/31; G03F1/54; G03F7/20
Attorney, Agent or Firm:
Keizo Okamoto