Title:
METHOD FOR MANUFACTURING PROBE
Document Type and Number:
Japanese Patent JP2015131990
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To easily provide a probe hardly slid when the probe is contacted with an object to be inspected and capable of accurately and stably evaluating characteristics.SOLUTION: A method for manufacturing a probe for inspection by directly contacting with an object to be inspected comprises: immersing a wire 1 served as the probe into an electrolytic solution 2 including a hypochlorite and a surfactant; and electrolytically polishing the wire 1 in the electrolytic solution 2. The polished portion in the electrolytic solution 2 becomes a tip region gradually sharpened toward a tip, and the surface of the tip region is roughened to form a plurality of projections and depressions.
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Inventors:
NISHIUMI TOSHIYA
Application Number:
JP2014003618A
Publication Date:
July 23, 2015
Filing Date:
January 10, 2014
Export Citation:
Assignee:
FUJITSU SEMICONDUCTOR LTD
International Classes:
C25F3/02; B23H3/00; B23H3/08; B23H9/08
Attorney, Agent or Firm:
Takayoshi Kokubun