To provide a method of manufacturing a thin-film photoelectric conversion module which will not complicate the adjustment of the optical system and enables suppression of the attachment of fine particles, generated from the formation of a recess to the side wall or bottom face of the recess.

The thin-film photoelectric conversion module comprises a substrate and a plurality of thin-film photoelectric conversion cells, which are formed on one principal plane of the substrate and are connected serially to each other. The method of manufacturing the thin-film photoelectric conversion module includes a process of forming a plurality of recesses parallel to each other in the thin films formed on one principal plane of the substrate 2 by scanning over the thin films with a plurality of laser beams 52. Scanning over the thin films with the laser beams 52 is conducted with fixed position of the substrate 2, while changing the direction of the optical axis of each laser beam 52.