To provide a method of manufacturing a thin film solar cell with excellent photoelectric conversion efficiency.
The method of manufacturing a thin film solar cell includes: a first process for forming a transparent electrode layer formed of translucent conductive material on a translucent insulating substrate; a second process for forming a semiconductor photoelectric conversion layer formed of a semiconductor layer on the transparent electrode layer and carrying out photoelectric conversion; a third process for forming a rear surface side transparent electrode layer formed of translucent conductive material having a light scattering layer on the semiconductor photoelectric conversion layer; and a fourth process for forming a rear surface reflecting electrode layer formed of reflective conductive material on the rear surface side transparent electrode layer. The third process includes the fourth process for forming a light scattering layer material film containing constituent material of the light scattering layer in an approximately uniform thickness on the semiconductor photoelectric conversion layer, and the fifth process for forming the light scattering layer by condensing the light scattering layer material film on the semiconductor photoelectric conversion layer at a temperature 200°C or lower to the light scattering layer material film.
| JPS61194818 | DEPOSITED FILM FORMING METHOD |
| JP2784821 | [Title of Invention] Photovoltaic element |
| JP2007266096 | SOLAR CELL AND ITS MANUFACTURING METHOD |
NAKAHATA TAKUMI
INOUE KAZUNORI
ODA KOJI
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