Title:
METHOD FOR MEASURING SHAPE OF HIGHLY ACCURATE PLANE
Document Type and Number:
Japanese Patent JP3589774
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enable a surface shape of a highly accurate plane entirely to be obtained by extremely simple calculation by employing a three-plane alignment method as a necessary technique in advance, and employing a method for approximating a relative shape of two planes to the above technique by a power series polynomial.
SOLUTION: Two pairs 53, 54 of glass plates different from each other among three glass plates are sequentially selected three times, relative displacement of measured faces of the pairs 53, 54 of the two glass plates is measured each time one of the glass plates is rotated by 90 degrees with respect to the other glass plate 53, a relational expression for making correspondence between measurement results for each rotation angle and a Zernike polynomial for approximating a relative shape between measured faces of the pair is created, and this relational expression is calculated to obtain a shape of a measured face of each glass plate.
More Like This:
Inventors:
Nobuaki Ueki
Application Number:
JP3144396A
Publication Date:
November 17, 2004
Filing Date:
January 24, 1996
Export Citation:
Assignee:
Fuji Photo Optical Co., Ltd.
International Classes:
G01B9/02; G01B11/24; G01B11/30; (IPC1-7): G01B11/24; G01B9/02
Domestic Patent References:
| JP6313707A | ||||
| JP6281427A | ||||
| JP5240626A |
Attorney, Agent or Firm:
Hiroshi Kawano