METHOD FOR MEASURING SHAPE OF SURFACE

Japanese Patent JPH05172510

A

PURPOSE:To exclude the effect of the shape of a probe by obtaining the image of a surface, based on the movement of the probe, thereafter tracing the obtained surface image with the shape of the probe which is actually measured beforehand, and obtaining the true surface image based on the lowest value of the locus drawn by the shape of the probe. CONSTITUTION:In observation of an image with a scanning tunneling current microscope (STM). The distance between a probe 2 and a sample 3 is controlled through a servo circuit 5 so that a tunnel current becomes constant. Under this state, the XY plane, which is in parallel with the surface of the sample 3, is scanned with a piezo-actuator 1. The Z-axis-actuator driving signal at the individual picture element of the XY plane is converted into the displacement amount with a computer 6, and image is obtained. The topograph image is obtained on a monitor screen 7. For correction of this image IM, the tip shape of the used probe 2 is accurately measured. Then, the measured STM image IM is used as the center of the circle, and the radius R in response to the radius R of the tip, which has been measured beforehand, is rolled. The lowest value of the Z coordinate at every XY coordinates at this time is stored. Thus, the correcting image CI, which is approximately equal to the actual surface shape RS is obtained. In this way, the distributions of the accurate widths and depths of the grooves can be measured.

JP2000035394	SCANNING PROBE MICROSCOPE
JP3084924	[Title of Invention] Atomic Force Microscope

ENDOU FUSAAKI
ASHIZAKI KOJI

JP35551691A

July 09, 1993

December 24, 1991

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SONY CORP

G01B7/34; G01N37/00; G01Q30/06; G01Q60/10; H01J37/28; (IPC1-7): G01B7/34; H01J37/28

Akira Koike (2 outside)

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