To realize automation and display easy to understand in the structural analysis of a high polymer.

The data of a scanning region of a predetermined range from STM(scanning tunnel microscope) 1 is taken in an image memory 3. The data of the first scanning region in the data of the scanning region is scanned while collated with the pattern group of a pattern memory part 7 by a pattern confirmation part 5. When the pattern group similar to the pattern group stored in a pattern memory part 7 is confirmed, this pattern group is converted into a symbolic mark to be stored. The original image is also stored. When there is a non-scanned region in an image memory 3, a next scanning region is scanned. When the scanning of the data of the image memory 3 is completed, a pattern confirmation image and a structural analysis result displaying the original image stored in the pattern confirmation part 5 and the stored symbolic mark in consideration of the phase coupling relation of the spatial arrangement of molecule constituting elements are displayed.