Title:
METHOD FOR MEASURING TILT ANGLE
Document Type and Number:
Japanese Patent JP2001304850
Kind Code:
A
Abstract:
To measure a tilt angle correctly by excluding human arbitrariness and the distortion due to the shape of the probe.
A two-dimensional area 5 on a substrate 3 and a two-dimensional area 6 on a tilt plane 4 are scanned by the probe of a scanning probe microscope to calculate the angle formed by the two 2 dimensional areas 5 and 6 in this measuring method of the tilt angle 2 of the tilt plane 4 formed on the substrate 3.
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Inventors:
NAGASE MASAO
KURIHARA KENJI
KURIHARA KENJI
Application Number:
JP2000122003A
Publication Date:
October 31, 2001
Filing Date:
April 24, 2000
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01B21/22; G01Q30/04; G01Q90/00; (IPC1-7): G01B21/22; G01N13/10
Attorney, Agent or Firm:
Yoshihiko Izumi (2 outside)