To accurately obtain the stress/strain near the inside surface of an sample by obtaining, based on measurement, at least one of the stress and strain near the exposed inside surface of a solid sample.
Firstly, an inside surface 2 of a solid sample 1 is exposed. Then, with the use of a laser Raman spectrum analysis, a Raman shift amount or a Raman scatter intensity, or bath of them near the exposed inside surface are measured, and based on thus obtained Raman shift amount or Raman scatter intensity or bath of them, a stress distribution 3 near the exposed inside surface are obtained. Then, based on the measuring result, an elasticity analysis is performed with 3-demention stress simulation, so that a stress distribution 3a on the inside surface, before the inside surface 2 is exposed (before destruction), is obtained by calculation. Thus, the stress distribution in the depth direction of the sample 1 is accurately obtained.
SAITO TOMOHIRO
USHIKU YUKIHIRO
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