METHOD FOR PREPARING SCHEDULE OF SUBSTRATE PROCESSOR AND ITS PROGRAM

Title:

METHOD FOR PREPARING SCHEDULE OF SUBSTRATE PROCESSOR AND ITS PROGRAM

Document Type and Number:

Japanese Patent JP3712370

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To improve an activity ratio by quickly realizing transition to processing based on a prepared schedule by varying a reference time according to a schedule preparation time.
SOLUTION: A schedule preparation time TC2 is compared with a reference time TR, and when the schedule preparation time TC2 exceeds the reference time TR, a prescribed time TS is added to the reference time TR, and scheduling is repeated until the preparation of the schedule is made available within a new reference time TR'. Therefore, when the preparation of the schedule within the reference time TR fails, the reference time TR is gradually extended, and when the preparation of the schedule is completed in a short time, processing is started after the short reference time TR. As a result, transition to processing based on the prepared schedule can be quickly realized, and the operation rate of a substrate processor can be improved.

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Inventors:

Shuo Hikita
Atsushi Kawai
Kiyoshi Akao
Osamu Horiguchi

Application Number:

JP2001286311A

Publication Date:

November 02, 2005

Filing Date:

September 20, 2001

Export Citation:

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Assignee:

Dainippon Screen Mfg. Co., Ltd.

International Classes:

G02F1/1333; G05B19/418; G06Q50/00; G06Q50/04; H01L21/304; (IPC1-7): G05B19/418

Domestic Patent References:

JP10207525A

Attorney, Agent or Firm:

Tsutomu Sugiya

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