Title:
METHOD FOR PREVENTING STICKING OF ELECTRODE FOR MICROMACHINING
Document Type and Number:
Japanese Patent JPH11340477
Kind Code:
A
Abstract:
To provide a technique for preventing sticking of electrodes therebetween.
Many protrusions and recesses in which a width of each recess is 0.01 to 0.1 μm are formed on at least any one surface of opposed surfaces of fixed electrodes 22, 32 and movable electrodes 21, 31 of an acceleration sensor 1. Contact areas between the electrodes 22, 32 and the electrodes 21, 31 are reduced, and a hydrophobic property of the silicon surface becomes strong. Accordingly, stickings both during its process and during its use scarcely occur.
Inventors:
MATSUMOTO YOSHINOBU
IDE TARO
OKAZAKI HISAO
IDE TARO
OKAZAKI HISAO
Application Number:
JP14418098A
Publication Date:
December 10, 1999
Filing Date:
May 26, 1998
Export Citation:
Assignee:
TEXAS INSTRUMENTS JAPAN
MATSUMOTO YOSHINOBU
MATSUMOTO YOSHINOBU
International Classes:
G01P15/125; B81B3/00; G01P15/18; H01L29/84; (IPC1-7): H01L29/84; G01P15/125
Attorney, Agent or Firm:
Shigeo Ishijima (1 outside)
Shigeo Ishijima (1 outside)
Shigeo Ishijima (1 outside)
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