METHOD OF PROCESSING PYROELECTRIC SUBSTRATE - MATSUSHITA ELECTRIC WORKS LTD

Title:

METHOD OF PROCESSING PYROELECTRIC SUBSTRATE

Document Type and Number:

Japanese Patent JP2001068748

Kind Code:

A

Abstract:

To stabilize the detection characteristic of a pyroelectric sensor by irradiating a cut portion or the facet of an opening for processing with a laser beam in such a manner that the composition of a pyroelectric substrate is improved.

A thin platelike pyroelectric substrate 1 is processed with a laser beam 6 to provide a cut portion or an opening. That is, a cut portion 2 or a facet 5 of an opening of the substrate 1 is irradiated with a laser beam 6 in such a manner that the composition of the substrate 1 is modified. As a result of this processing, a slit or a through hole as the portion 2 or the opening is formed, and the processed facet 5 of the substrate 1 is heated to a prescribed temperature by the beam 6 to have its quality modified.

Inventors:

NISHIMURA MAKOTO
MIYAGAWA NOBUYUKI
KAWASHIMA MASAHITO

Application Number:

JP23827599A

Publication Date:

March 16, 2001

Filing Date:

August 25, 1999

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC WORKS LTD

International Classes:

B23K26/352; H01L37/02; H01L41/22; H01L41/335; (IPC1-7): H01L37/02; B23K26/00; H01L41/22

Attorney, Agent or Firm:

Junji Ando (1 person outside)

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