Title:
METHOD FOR PRODUCING FLUORINE-CONTAINING POLYMER AND COMPOSITION THEREOF
Document Type and Number:
Japanese Patent JP2021185236
Kind Code:
A
Abstract:
To provide a method for producing a fluorine-containing polymer and a composition thereof.SOLUTION: There is provided a composition comprising a fluorine-containing polymer (A) containing a constituent unit having a fluorine-containing aliphatic ring as a main component and an aprotic solvent (B), wherein the fluorine-containing aliphatic ring of the fluorine-containing polymer (A) has one, two or three etheric oxygen atoms as a ring-constituting atom and when the fluorine-containing aliphatic ring contains a plurality of the etheric oxygen atoms, the etheric oxygen atoms are not adjacent to each other and the content of the fluorine-containing polymer (A) to the mass of the composition is 20 mass% or more.SELECTED DRAWING: None
Inventors:
SUZUKI YUKI
MATSUURA MAKOTO
OGATA AKITOSHI
SHIRAI ATSUSHI
OKADA TOMOAKI
ASHIDA SHIOMI
TANAKA YOSHITO
KISHIKAWA YOSUKE
MATSUURA MAKOTO
OGATA AKITOSHI
SHIRAI ATSUSHI
OKADA TOMOAKI
ASHIDA SHIOMI
TANAKA YOSHITO
KISHIKAWA YOSUKE
Application Number:
JP2021132511A
Publication Date:
December 09, 2021
Filing Date:
August 17, 2021
Export Citation:
Assignee:
DAIKIN IND LTD
International Classes:
C08L27/12; C08F14/18; C08F16/32; C08F34/02; C08K5/02; C08K5/06
Domestic Patent References:
| JPH09512854A | 1997-12-22 | |||
| JPS6330509A | 1988-02-09 |
Foreign References:
| WO2004092235A1 | 2004-10-28 | |||
| WO2013157395A1 | 2013-10-24 | |||
| WO2009034952A1 | 2009-03-19 |
Other References:
FRENCH, ROGER H.; WHELAND, ROBERT C.; QIU, WEIMING; LEMON, M. F.; ZHANG, EDWARD; GORDON, JOSEPH; PET: "Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fund", JOURNAL OF FLUORINE CHEMISTRY, vol. 122(1), JPN6020049367, 2003, pages 63 - 80, ISSN: 0005104555
FANG, MINFENG; CHIANG, HAO-CHUN; OKAMOTO, YOSHIYUKI: "Mechanical and optical properties of the copolymers of perfluoro(2-methylene-4-methyl-1,3-dioxolane)", JOURNAL OF FLUORINE CHEMISTRY, vol. 214, JPN6020049368, 2018, pages 63 - 67, XP085462706, ISSN: 0005104556, DOI: 10.1016/j.jfluchem.2018.08.001
FANG, MINFENG; CHIANG, HAO-CHUN; OKAMOTO, YOSHIYUKI: "Mechanical and optical properties of the copolymers of perfluoro(2-methylene-4-methyl-1,3-dioxolane)", JOURNAL OF FLUORINE CHEMISTRY, vol. 214, JPN6020049368, 2018, pages 63 - 67, XP085462706, ISSN: 0005104556, DOI: 10.1016/j.jfluchem.2018.08.001
Attorney, Agent or Firm:
Patent Business Corporation Saegusa International Patent Office