Title:
METHOD FOR PRODUCING GAS BARRIER FILM, GAS BARRIER FILM AND ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2016089083
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing a gas barrier film and a gas barrier film that can afford stable gas barrier performance and to provide an electronic device that has the gas barrier film, can suppress the occurrence of dark spots and is excellent in durability.SOLUTION: The method for producing a gas barrier film having a gas barrier layer formed by performing modification treatment by vacuum ultraviolet ray irradiation has steps (A) to (E) in which the step (E) is performed before the step (A) or between the step (A) and the step (B). (A): a step of laminating a protective film having a tacky layer on a base material; (B): a step of peeling the protective film from the base material; (C): a step of coating a peeled surface of the base material with a solution containing a polysilazane compound after the step (B); (D): a step of irradiating the coating film formed by the step (C) with vacuum ultraviolet rays and subjecting the coating film to modification treatment to form a gas barrier layer; and (E): a step of forming an antistatic layer on a rear face side opposite from the peeled face side of the base material.SELECTED DRAWING: Figure 1
Inventors:
GOTO YOSHITAKA
Application Number:
JP2014226824A
Publication Date:
May 23, 2016
Filing Date:
November 07, 2014
Export Citation:
Assignee:
KONICA MINOLTA INC
International Classes:
C08J7/04; B32B7/06; B32B9/00; C08J7/00; C08J7/06; H01L31/048
Attorney, Agent or Firm:
Gwangyang International Patent Office