Title:
重合体の製造方法、およびレジスト組成物の製造方法
Document Type and Number:
Japanese Patent JP5820354
Kind Code:
B2
More Like This:
Inventors:
Hideyuki Inaba
Takashi Mihashi
Takashi Mihashi
Application Number:
JP2012185275A
Publication Date:
November 24, 2015
Filing Date:
August 24, 2012
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F2/04; C08K5/00; C08L57/00; G03F7/039; H01L21/027
Domestic Patent References:
| JP2005171093A | ||||
| JP2006282901A |
Foreign References:
| WO2006001113A1 | ||||
| WO2005105869A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Tadashi Takahashi
Suzuki Mitsuyoshi