To provide a method for producing a fine structure with high precision and in a high yield by simplifying a production process.
A method for producing a structure includes steps of, in this order, preparing a substrate composed of a first resin layer and a second resin layer laminated in this order, the first resin layer being made of a positive photosensitive resin having positive photosensitivity to light having a wavelength of 280 nm or more, and the second resin layer containing an anthracene compound, partially exposing the second resin layer to light having a wavelength of 300 nm or more, radiating light having a wavelength of 280 nm or more to the first resin layer through the exposed portions of the second resin layer using the unexposed portions of the second resin layer as a mask, thereby exposing the first resin layer to light, and removing the exposed portions of the first resin layer to form a structure.
| JPS61295044 | RECORDER |
| JPH07232434 | METHOD AND DEVICE FOR RECORDING |
| JPH11291500 | LIQUID DELIVERY METHOD AND LIQUID DELIVERY HEAD |
| JPS61122644A | 1986-06-10 | |||
| JP2008290413A | 2008-12-04 | |||
| JPH04102309A | 1992-04-03 | |||
| JP2008299165A | 2008-12-11 | |||
| JPS6358367B2 | 1988-11-15 | |||
| JPS6433543A | 1989-02-03 | |||
| JPH02269353A | 1990-11-02 | |||
| JPH01152451A | 1989-06-14 | |||
| JPS61122644A | 1986-06-10 | |||
| JP2008299165A | 2008-12-11 | |||
| JP2008290413A | 2008-12-04 | |||
| JPH04102309A | 1992-04-03 | |||
| JPS6358367B2 | 1988-11-15 | |||
| JPS6433543A | 1989-02-03 | |||
| JPH02269353A | 1990-11-02 | |||
| JPH01152451A | 1989-06-14 |
JPN6015037212; Ｊｏｈｎ Ｓ． Ｈａｒｇｒｅａｖｅｓ ｅｔ．ａｌ．: '"Ａ Ｐｈｏｔｏｃｈｅｍｉｃａｌ Ｉｍａｇｅ Ｅｎｈａｎｃｅｍｅｎｔ Ｐｒｏｃｅｓｓ"' Ｊｏｕｒｎａｌ ｏｆ Ｔｈｅ Ｅｌｅｃｔｒｏｃｈｅｍｉｃａｌ Ｓｏｃｉｅｔｙ Ｖｏｌ．１３６， Ｎｏ．１, 198901, ｐａｇｅｓ ２２５-２３０
Sogo Kuroiwa
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