PURPOSE: To efficiently cool a molten layer at the lower part of a crucible in the total melting and solidifying system by cooling the bottom face of an outer holding vessel and its side face, if necessary, with a coolant introduced from a crucible supporting shaft.
CONSTITUTION: A crucible 16 on a crucible supporting shaft 17 consists of a bottomed cylindrical qhartz inner vessel 16a and a bottomed outer holding vessel 16b engaged with the outside of the vessel 16a. A first cavity 21 is formed at the bottom of the vessel 16b to circulate a coolant, a passage 20 is connected to the cavity, and the cavity 21 is communicated with an outer passage 23. The influent coolant flows to the outer passage 23 from the passage 20 through the cavity 21. Meanwhile, a main heater 18 is concentrically set around the crucible 16, and a subheater 19 is furnished below the main heater. Consequently, the subheater 19 is turned off when a solid layer 31 is formed, the molten layer 30 at the lower part of the crucible 16 is efficiently cooled, the molten layer 30 is solidified in a short time, and the solid layer 31 forming time is shortened.
MIYAHARA SHUNJI
FUJIWARA TOSHIYUKI
KUBO TAKAYUKI
FUJIWARA HIDEKI
INAMI SHUICHI
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