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Title:
METHOD FOR PULLING UP SINGLE CRYSTAL AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JPH10139584
Kind Code:
A
Abstract:

To provide a method by which the single crystal can safely be pulled up without causing falling of the crystal at the time of producing a single crystal having a great weight and also to provide the device for the method.

(1) This method for pulling up a single crystal by a Czochralski method comprises: forming a neck part in a single crystal 3 by a single crystal pulling-up means 4; then, gripping the neck part by using a pair of holding jigs 9 moveably engaged with a holding frame 8; and thereafter, pulling up the single crystal 3 in cooperation with the single crystal pulling-up means 4. (2) This device is provided with: the single crystal pulling-up means 4 for forming the neck part; a holding frame adjustment means 5 for adjusting the height of the holding frame 8; and a holding jig adjustment means 6 for adjusting the position of the holding jigs 9 moveably engaged with the holding frame 8; wherein these means 4, 5 and 6 are coaxially arranged with each other and the neck part of the single crystal 3 is gripped with the holding jigs 9 to pull up the holding frame 8 and holding jigs 9 in cooperation with the single crystal pulling-up means 4. In the device, desirably, the fixed frame 8d is formed into a staircase shape and the position adjustment of the holding jigs 9 movably engaged with the holding frame 8 is performed by elevating/lowering the pair of jigs 9 with two wires 10 respectively.


Inventors:
IZUMI TERUO
YAMAMOTO YOICHI
Application Number:
JP29900796A
Publication Date:
May 26, 1998
Filing Date:
November 11, 1996
Export Citation:
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Assignee:
SUMITOMO SITIX CORP
International Classes:
C30B15/30; C30B15/32; C30B29/06; H01L21/208; (IPC1-7): C30B15/30; C30B15/32; C30B29/06
Attorney, Agent or Firm:
Morio Mori (1 outside)