To provide a method for purging a connection part of a material tank in a liquid-material delivery system, for performing a purge in a connection part of a material tank in a short time, and surely checking the effect of the purge.
In the liquid material delivery system, an evacuation line 14 is connected to an inactive gas conduction pipe 2 or a liquid-material outflow pipe 3. A gas flow-path 11 from an opening/closing valve 4 of the pipe 2 to an opening/closing valve 8 of an inactive-gas-conduction pipe 6, and a liquid flow-path 12 from an opening/closing valve 5 of the pipe 3 to an opening/closing valve 9 of a liquid-material outflow pipe 7 are evacuate with a vacuum pump 17. A pressure-check line 22 provided with an opening/closing valve 23 and a pressure sensor 24 is connected to either one of the inactive-gas-conduction pipe 6 or the liquid-material outflow pipe 7. After evacuation of the liquid flow-path, the valve 23 of the one 22 is opened and the pressure in the flow path 11, 12 is checked with the sensor 24.
| JPH0624475 | REPLACING DEVICE OF BOTTLE |
| WO/1994/010081 | FLUID COUPLINGS |
| WO/1992/000914 | MULTIPLE TUBE TO BUNG COUPLING |
NAGANO TADAYUKI
MINAMI SHINGO
