Title:
METHOD OF REMOVING METALLIC FOREIGN MATTER
Document Type and Number:
Japanese Patent JP2007005346
Kind Code:
A
Abstract:
To provide a method of removing metallic foreign matters capable of reliably removing the metallic foreign matters mixed into an inorganic filler.
The method for removing the metallic foreign matters mixed into the inorganic filler comprises a metallic foreign matter removal step for removing the metallic foreign matters by allowing the metallic foreign matters mixed into the inorganic filler to flow out by an acid solution; an inorganic filler cleaning step for cleaning the inorganic filler in which the metallic foreign matters have been removed by a cleaning liquid; and a step for volatilizing the cleaning liquid adhering to the inorganic filler by heating the inorganic filler.
Inventors:
OYAMA NORITAKA
Application Number:
JP2005180342A
Publication Date:
January 11, 2007
Filing Date:
June 21, 2005
Export Citation:
Assignee:
SANYU REC CO LTD
International Classes:
H01L23/29; C01B33/18; H01L23/31
Domestic Patent References:
| JPH04175218A | 1992-06-23 |
Attorney, Agent or Firm:
Eiji Saegusa
Kakehi Yuro
Shinichi Mashita
Kakehi Yuro
Shinichi Mashita
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