METHOD FOR TRANSPORTING ULTRAPURE GAS TO POINT OF USE AND SYSTEM THEREFOR

Title:

METHOD FOR TRANSPORTING ULTRAPURE GAS TO POINT OF USE AND SYSTEM THEREFOR

Document Type and Number:

Japanese Patent JPH11165060

Kind Code:

A

Abstract:

To provide a method for efficiently transporting an ultrapure gas from a first station to a second station far from the first station.

An ultrapure liq. source 12 is provided, the ultrapure liq. is transported from the source to one or more phase changing means 20a for changing the phase of the liq. to generate an ultrapure gas, the phase of the liq. is changed in the means 20a, the generated ultrapure gas is sent to a second station 30a from phase changing means 20a.

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Inventors:

FRIEDT JEAN-MARIE (FR)
CHARLES JEAN-MICHEL (FR)

Application Number:

JP26170698A

Publication Date:

June 22, 1999

Filing Date:

September 16, 1998

Export Citation:

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Assignee:

AIR LIQUIDE (FR)

International Classes:

B01J4/00; F17C7/04; H01L21/205; (IPC1-7): B01J4/00; H01L21/205

Attorney, Agent or Firm:

Takehiko Suzue (4 outside)

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