PURPOSE: To increase the driving force with low voltage, provide the stable characteristic against the change of the environmental temperature, and reduce the cost with a simple structure by providing driving force generation sections and heater members arranged at symmetrical positions on both sides of rotary shafts.
CONSTITUTION: Driving force generation sections 6a, 6b, 6c, 6d are provided at symmetrical positions on both the right and left sides of rotary shafts 3a, 3b. Heater circuits 8a, 8b having heating sections 10a, 10b, 10c, 10d are provided on a silicon monocrystal substrate l, and a bimetal is constituted of the heating sections 10a, 10b, 10c, 10d and the driving force generation sections 6a, 6b, 6c, 6d. When voltage is applied to the circuits 8a, 8b, the moving sections of the driving force generation sections 6a, 6b, 6c, 6d are heated and deformed, the moment around the rotary shafts 3a, 3b is generated on a rotation section 4, and the rotation section 4 is rotated. Large driving force can be obtained with low voltage, and the structure is not made complex. A malfunction caused by the change of the environmental temperature is prevented, and reliability can be improved.
| WO/1992/022763 | MINIATURE ACTUATING DEVICE |
| WO/2008/107573 | MEMS-TYPE MICRO-RELAY AND RELATED MANUFACTURING METHOD |
| WO/2002/096796 | MEMBRANE FOR MICRO-ELECTRO-MECHANICAL SWITCH, AND METHODS OF MAKING AND USING IT |
KIMURA KAZUHIRO
HIRATA SUSUMU
ISHII YORISHIGE
OTA KENJI
