Title:
MICRO-MACHINED SPEED SENSOR SYSTEM FOR SENSING ROTATING SPEED, AND METHOD FOR MINIMIZING PARASITIC DRIVING VOLTAGE
Document Type and Number:
Japanese Patent JP3894587
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device and a method for minimizing parasitic driving voltage penetration in a speed sensing system.
SOLUTION: A micro-machined speed sensor system includes plural tested masses 310, 312 or plates connected to plural electrostatic combs 340, 342, 344, 346. A comb drive amplifier 322 induces the deflection of the sensing plate. Motor combs 340, 342 are driven by half NRF(natural resonance frequency) by connecting the comb drive amplifier 322 to a half-frequency motor oscilator 400. The half-frequency motor oscillator 400 provides the driving voltage with the half NRF(natural resonance frequency). Accordingly, undesired parasitic drive penetration is removed by the motor frequency to heighten the efficiency.
Inventors:
Hugh Jay Murphy
Application Number:
JP25101095A
Publication Date:
March 22, 2007
Filing Date:
September 28, 1995
Export Citation:
Assignee:
ROCKWELL INTERNATIONAL CORPORATION
International Classes:
B81B3/00; G01C19/5719; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP6258333A | ||||
| JP5264282A | ||||
| JP3243818A | ||||
| JP3051711A | ||||
| JP63058111A |
Foreign References:
| US5349855 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yutaka Horii
Toshio Morita
Yutaka Horii
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