To increase diaphragm durability and improve pressurizing effect by providing a diaphragm for closing the upper side of an opening drilled through a substrate, and forming a pumping object fluid passage substantially analogous to the cross section of the expanded part of the diaphragm, and providing a front plate in the flow passage for accepting the diaphragm.
This micro pump for feeding a trace quantity of driven fluid such as an adhesive on the expansion and contraction of diaphragms 3a to 3e, has a translucent plate 10 jointed to the reverse side of a diaphragm substrate 1, and the upper parts of holes 2a to 2e drilled through the substrate 1 are closed with diaphragms 3a and 3e. Also, a light absorbing body 4a is made to generate heat via a laser beam introduced through an optical fiber 8a, thereby gasifying a fluid having a low boiling point in the hole 2a and expanding the diaphragm 3a into a flow passage 21. In this case, the flow passage 21 is formed to have a cross section substantially analogous to the expanded part of the diaphragm 3a at a synthetic resin fine molding process using the optical forming technology, and the flow passage 21 is provided with a front plate 26 for accepting the diaphragms 3a to 3e.
KONO TAKASHI
NOGI MORINOBU
ANDO SHINJI
ANDO MITSUHIRO
NARUSE YOSHIHIRO
