To reduce a production cost and drive a movable plate by a large rocking angle, even at a low drive voltage in a micro rocking device that is applicable to optical elements.
The optical element 1 includes a movable plate 2, a beam 3 for supporting the movable plate 2 to serve as a rotating axis thereof, a frame part 4 for supporting an end of the beam 3, and a drive plate 5 formed at a part of the beam 3. Interdigital electrodes 5a, 4c, which are engaged with each other and constitute horizontal electrostatic combs 6, are formed at the end of the drive plate 5 and the frame part 4 facing thereto, respectively. When a voltage is applied to the horizontal electrostatic com 6 and a drive force is generated, the drive plate 5 is displaced in the horizontal direction orthogonal to the longitudinal direction of the beam 3. When the drive plate 5 is driven reciprocatively and the rotating axis is displaced, a momentum is developed in the movable plate 2. The movable plate 2 is rocked at a large rocking angle due to the restoring force generated, when the beam 3 is twisted and the momenturm developed when the rotary axis is displaced. Ferromagnetic materials are not used, resulting in a simple structure, and the production cost thereof is reduced.
NOGE HIROSHI
HAGIWARA YOSUKE
Katsumi Taguchi
Shinichi Mizuta