Title:
MINUTE VIBRATION BODY, MINUTE VIBRATION BODY MANUFACTURING METHOD, AND MINUTE VIBRATION BODY PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2023135938
Kind Code:
A
Abstract:
To simply form a minute vibration body which includes a curved surface part having a three-dimensional curved surface shape and does not include a flat part in a rim in the curved surface part.SOLUTION: A base material 20 is prepared, which comprises: a flat part 203; and a curved surface part 201 being an inner peripheral part surrounded with the flat part and has a three-dimensional curved shape including a hemispherical shape projecting from one surface 203a of the flat part. While the base material 20 is rotated in an adsorptive retention state, an outer side surface 201a of the curved surface part 201 is irradiated with a laser beam, so as to separate the curved surface part 201 from the flat part 203.SELECTED DRAWING: Figure 6H
Inventors:
INAGAKI YUUKI
ITO YUJI
ICHIHASHI YUKI
ITO YUJI
ICHIHASHI YUKI
Application Number:
JP2022041287A
Publication Date:
September 29, 2023
Filing Date:
March 16, 2022
Export Citation:
Assignee:
DENSO CORP
TOYOTA MOTOR CORP
MIRISE TECH CORP
TOYOTA MOTOR CORP
MIRISE TECH CORP
International Classes:
G01C19/5691; B23K26/08; B23K26/38; H01L29/84
Attorney, Agent or Firm:
Patent Attorney Corporation Yuuai Patent Office
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