Title:
OPTICAL ELEMENT, OPTICAL SYSTEM, AND OPTICAL APPARATUS
Document Type and Number:
Japanese Patent JP2023135937
Kind Code:
A
Abstract:
To provide an optical element having high mechanical strength, environmental durability, and antifouling performance.SOLUTION: An optical element (300) has a substrate (200) and an antireflection film (100). The antireflection film comprises a first film (111) formed on the substrate and a second film (101) formed on the first film. The second film comprises a first layer, a second layer, and a third layer in order from a side closer to the first film. The first layer includes magnesium fluoride, the second layer includes silicon oxide and aluminum oxide, and the third layer includes a fluorine-containing organic compound.SELECTED DRAWING: Figure 1
Inventors:
UCHIDA KAZUE
BAN MITSUO
BAN MITSUO
Application Number:
JP2022041285A
Publication Date:
September 29, 2023
Filing Date:
March 16, 2022
Export Citation:
Assignee:
CANON KK
International Classes:
G02B1/115; B32B7/023; B32B9/00; B32B9/04; C23C14/06; C23C14/08; C23C14/10
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsuya Mizumoto
Tomoya Hirayama
Atsuya Mizumoto
Tomoya Hirayama
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