Title:
MICROMECHANICAL CAP STRUCTURE
Document Type and Number:
Japanese Patent JP2012091317
Kind Code:
A
Abstract:
To enhance stability of a bonded surface micromechanical component, by maintaining an outside chip dimension unchangeable as much as possible, by maintaining excellent vacuum sealing.
This micromechanical cap structure includes a substrate 10, and a cavity K is arranged in the substrate 10. The cavity K has a square base surface and two sidewall division pairs constituted of mutually opposed parallel sidewall divisions. Local reinforcement of a diaphragm corresponding to the base surface of the cavity K is attained by a stabilizing cross having stabilizing beams SK1 and SK2.
Inventors:
PINTER STEFAN DR
EMMERICH HARALD
TRAH HANS-PETER
BAUMANN HELMUT DR
EMMERICH HARALD
TRAH HANS-PETER
BAUMANN HELMUT DR
Application Number:
JP2011237797A
Publication Date:
May 17, 2012
Filing Date:
October 28, 2011
Export Citation:
Assignee:
BOSCH GMBH ROBERT
International Classes:
B81B3/00; B81B1/00; B81B7/00; G01P9/04; B81C1/00; G01C19/5783; G01P1/02; G01P15/08; H01L23/02; H01L23/06; H01L23/10; H01L29/84
Domestic Patent References:
| JPH0832088A | 1996-02-02 | |||
| JPH07159432A | 1995-06-23 | |||
| JPH0526903A | 1993-02-05 | |||
| JPH08316497A | 1996-11-29 | |||
| JPH08274208A | 1996-10-18 | |||
| JPS6013314B2 | 1985-04-06 | |||
| JPH117649A | 1999-01-12 | |||
| JPH0832088A | 1996-02-02 |
Attorney, Agent or Firm:
Takuya Kuno
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard
Takahashi
Kimihiro Hoshi
Hiroyasu Ninomiya
Ryoichi Shino
Einzel Felix-Reinhard