Title:
微細システム技術と微細構造形成のための新規薄層ならびにその使用
Document Type and Number:
Japanese Patent JP3624382
Kind Code:
B2
Abstract:
The present invention relates to novel thin layers for microsystem techniques and microstructuring. It is an object of the invention to provide thin layers which can be manufactured under less problems and more economically than the previous conventional layers, and which permit the use of existing technologies for microstructuring. The object is realized in that the thin layer is formed of an enzymatically degradable biopolymer in a range of layer thicknesses of from 30 nm to 3 mum. Biopolymeric thin layers manufactured according to the invention permit their application, after a respective structurizing, as test assays or in setting up substance libraries.
Inventors:
Erman Trout, Eugen
Kohler, Johann Michael
Schulz, Torsten
Wolfert, Claus
Bjellhur, Stephan
Kohler, Johann Michael
Schulz, Torsten
Wolfert, Claus
Bjellhur, Stephan
Application Number:
JP51043098A
Publication Date:
March 02, 2005
Filing Date:
August 22, 1997
Export Citation:
Assignee:
Clondiag Chip Tehinologies Game Bha
International Classes:
G01N31/20; B01J19/00; C12M1/00; C12N15/09; C12Q1/00; H01L21/312; (IPC1-7): G01N31/20
Domestic Patent References:
| JP64005489A |
Attorney, Agent or Firm:
Yu Saito