Title:
ファブリペロー干渉計のためのミラープレート、およびファブリペロー干渉計
Document Type and Number:
Japanese Patent JP6730300
Kind Code:
B2
Abstract:
A method for producing a mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - providing a substrate (50), which comprises silicon (Si), - implementing a semi-transparent reflective coating (110) on the substrate (50), - forming a passivated region (70a) in and/or on the substrate (50) by etching a plurality of voids (E1) in the substrate (50), and by passivating the surfaces of the voids (E1), - forming a first sensor electrode (G1a) on top of the passivated region (70a), and - forming a second sensor electrode (G1b) supported by the substrate (50).
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Inventors:
Valpora Arpo
Prunilla Mika
Grigorash Kestutis
Prunilla Mika
Grigorash Kestutis
Application Number:
JP2017547156A
Publication Date:
July 29, 2020
Filing Date:
March 08, 2016
Export Citation:
Assignee:
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
International Classes:
G02B26/00; B81B3/00; B81C1/00; G01B9/02; G01J3/26
Domestic Patent References:
| JP2015018232A | ||||
| JP2014182169A | ||||
| JP2007219484A |
Foreign References:
| US20120206813 | ||||
| CN101004477A |
Other References:
LAMMEL, Gerhard et al.,Tunable Optical Filter of Porous Silicon as Key Component for a MEMS Spectromerer,JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,米国,IEEE SERVICE CENTER,2002年,Vol.11, No.6,P.815-827
Attorney, Agent or Firm:
Fumio Takino
Toshiaki Tsuda
Yasuhiro Fukuda
Toshiaki Tsuda
Yasuhiro Fukuda