Title:
ミラートロンスパッタ装置
Document Type and Number:
Japanese Patent JP4854569
Kind Code:
B2
More Like This:
Inventors:
Eiji Tao
Application Number:
JP2007096174A
Publication Date:
January 18, 2012
Filing Date:
April 02, 2007
Export Citation:
Assignee:
Choshu Industry Co., Ltd.
International Classes:
C23C14/35
Domestic Patent References:
| JP2309614A | ||||
| JP60182711A | ||||
| JP2002069632A |
Attorney, Agent or Firm:
Masanobu Kureda