Title:
MOLECULAR LAYER DEPOSITION METHOD FOR PRODUCTION OF ORGANIC OR ORGANIC-INORGANIC POLYMER
Document Type and Number:
Japanese Patent JP2014129606
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a molecular layer deposition method of depositing an ultra-thin layer of an organic polymer or an organic-inorganic composite polymer on a substrate.SOLUTION: A molecular layer depositing method is based on a step of bringing a substrate in contact with at least two gas-phase reactants, in order or alternately, to form a polymer chain. Each of the gas-phase reactants reacts with another gas-phase reactant, then reacts with a functional group formed on the polymer chain through only one monofunctionality to form a bond of the polymer chain and a new functional group or a precursor of a new functional group. For example, a gas-phase reactant cyclic azasilane having a first functional group SiO reacts with a hydroxy group on the surface of a substrate, through only a monofunctionality, to form a silicon-oxygen bond, and the cyclic azasilane is ring-opened to leave a primary amine. A gas-phase reactant ethylene carbonate having a second functional group COO reacts with the primary amine to form a polyurethane bond, and the ethylene carbonate is ring-opened to leave a hydroxy group on the surface. The two gas phase reactions are repeated once or more.
Inventors:
STEVEN M GEORGE
ARRELAINE ALLEN DAMERON
ADAMCYZK NICOLE MARIE
YOON BYUNGHOON
ARRELAINE ALLEN DAMERON
ADAMCYZK NICOLE MARIE
YOON BYUNGHOON
Application Number:
JP2014020366A
Publication Date:
July 10, 2014
Filing Date:
February 05, 2014
Export Citation:
Assignee:
UNIV OF COLORADO THE
International Classes:
C23C16/30; C23C16/455; H01L21/312
Domestic Patent References:
| JPH04178434A | 1992-06-25 | |||
| JPH0869024A | 1996-03-12 | |||
| JPH01291224A | 1989-11-22 | |||
| JPH04296729A | 1992-10-21 | |||
| JPH01180531A | 1989-07-18 | |||
| JPH02201321A | 1990-08-09 | |||
| JPH11274602A | 1999-10-08 | |||
| JPH08176803A | 1996-07-09 | |||
| JP2007516347A | 2007-06-21 | |||
| JP2004535514A | 2004-11-25 | |||
| JPH04178434A | 1992-06-25 | |||
| JPH0869024A | 1996-03-12 | |||
| JPH01291224A | 1989-11-22 | |||
| JPH04296729A | 1992-10-21 | |||
| JPH01180531A | 1989-07-18 | |||
| JPH02201321A | 1990-08-09 | |||
| JPH11274602A | 1999-10-08 | |||
| JPH08176803A | 1996-07-09 | |||
| JP2007516347A | 2007-06-21 | |||
| JP2004535514A | 2004-11-25 |
Attorney, Agent or Firm:
Akira Shimoda
Kenichiro Akao
Kenichiro Akao