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Title:
MOLECULAR TURBOPUMP
Document Type and Number:
Japanese Patent JPS63255596
Kind Code:
A
Abstract:

PURPOSE: To improve the lubricity by forming a thrust bearing by forming a dynamic pressure generating groove on one between a thrust receiving plate and a supporting member and fitting the edge part of a motor shaft into a fluid sealed chamber.

CONSTITUTION: A thrust bearing part is formed from a thrust receiving plate 7 having a spiral groove 6 and a supporting member 8, and supported in rotatable ways by a radial bearing 11 installed at the edge part of a motor shaft. The motor shaft edge part is fitted into a fluid sealed chamber 9, and used as spiral groove bearing. Therefore, the generation of decomposition gas of the lubricating oil which is generated in case of the prior ball bearing can be suppressed, and the deterioration of the lubricating agent can be prevented.


Inventors:
MIZOBUCHI SHOTARO
HARADA HIDEOMI
OSADA NORIYUKI
KANAMORI TOSHIYA
Application Number:
JP8873587A
Publication Date:
October 21, 1988
Filing Date:
April 13, 1987
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Yakushi Minoru



 
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