Title:
MONITORING DEVICE FOR OPTICAL FILM THICKNESS
Document Type and Number:
Japanese Patent JP2002250608
Kind Code:
A
Abstract:
To remove the influence of a light quantity fluctuation noise due to the fluctuation of the air inside a film thickness monitoring device, and to thereby enable highly accurate measurement.
This device has a light source 1 for emitting light, a floodlighting optical system 2 for guiding the light from the light source 1 onto a test surface 5, a light-receiving optical system 3 for receiving reflected light from the test surface 5, and guiding the light to a light intensity measuring element 4, and an air removal means 6 for removing the air inside the floodlighting optical system 2 and the light-receiving optical system 3.
Inventors:
OGAWA KOTA
WADA YORIO
NAKAMURA YASUSHI
TAKAHASHI KENJI
WADA YORIO
NAKAMURA YASUSHI
TAKAHASHI KENJI
Application Number:
JP2001047595A
Publication Date:
September 06, 2002
Filing Date:
February 23, 2001
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Attorney, Agent or Firm:
Takeshi Nara
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