Title:
MSM COMPONENT AND ASSOCIATED GAS PANEL ASSEMBLY
Document Type and Number:
Japanese Patent JP2013127312
Kind Code:
A
Abstract:
To devise a new approach that minimizes space requirements, substantially eliminates the number of parts needed and allows easy servicing of MSM components so as to assemble gas panel systems.
A gas panel assembly having at least one U-shaped MSM interconnection component 6 is disclosed where the interconnection component 6 straddles at least a pair of adjacent modular inserts 4 and is fastened to planar support plate 1 such that the fluidic inserts 4 are held immobile.
Inventors:
ERIKSSON MARK L
Application Number:
JP2012262106A
Publication Date:
June 27, 2013
Filing Date:
November 30, 2012
Export Citation:
Assignee:
TALON INNOVATIONS CORP
International Classes:
F16L41/02; C23C16/455; H01L21/205
Domestic Patent References:
| JP2001153289A | 2001-06-08 | |||
| JP2002506181A | 2002-02-26 | |||
| JP2006100643A | 2006-04-13 | |||
| JP2007078005A | 2007-03-29 | |||
| JP2006521522A | 2006-09-21 | |||
| JP2007532844A | 2007-11-15 | |||
| JP2001503840A | 2001-03-21 |
Foreign References:
| WO2005008107A2 | 2005-01-27 | |||
| US6640835B1 | 2003-11-04 |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Wataru Kitakita
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Wataru Kitakita