MULTI CHARGED PARTICLE BEAM BLANKING APPARATUS, MULTI CHARGED PARTICLE BEAM BLANKING METHOD, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

Title:

MULTI CHARGED PARTICLE BEAM BLANKING APPARATUS, MULTI CHARGED PARTICLE BEAM BLANKING METHOD, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

Document Type and Number:

Japanese Patent JP2017168574

Kind Code:

A

Abstract:

PURPOSE: To provide a blanking apparatus that can control not to form, in multi-beams, a defective beam which is fixed to a beam ON state and unable to be blanking-controlled.CONSTITUTION: A multi charged particle beam blanking apparatus includes: a plurality of reference electrodes 26 on a substrate having a plurality of passage holes formed in an array to pass multi-beams using charged particle beams through, each reference electrode arranged closely to a corresponding one of the plurality of passage holes, where a reference potential, not a ground potential, is applied to the reference electrodes not via a transistor circuit in an irradiation region of the whole multi-beams; a plurality of switching electrodes 24 on the substrate, each arranged opposite a corresponding one of the plurality of reference electrodes across a corresponding one of the plurality of passage holes, where the reference potential and a control potential different from the reference potential are applied to the switching electrodes in a switchable manner; and a plurality of control circuits 41 using transistor circuits, arranged in the substrate and configured to apply the reference potential and the control potential in the switchable manner to a corresponding one of the plurality of switching electrodes.SELECTED DRAWING: Figure 6

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Inventors:

MATSUMOTO YASUSHI

Application Number:

JP2016051221A

Publication Date:

September 21, 2017

Filing Date:

March 15, 2016

Export Citation:

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Assignee:

NUFLARE TECHNOLOGY INC

International Classes:

H01L21/027; G03F7/20; G21K1/04; H01J37/147; H01J37/305

Domestic Patent References:

JPH03174715A	1991-07-29
JP2009004366A	2009-01-08
JP2005328047A	2005-11-24
JP2013197469A	2013-09-30

Attorney, Agent or Firm:

Tetsuma Ikegami
Akira Sudo
Mitsuyuki Matsuyama

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