PURPOSE: To realize a high reflection factor in the wavelength range of soft X rays by using a material which contains lithium as its base for a layer with a high refractive index and using nickel for a layer with a low refractive index, and combining them and constituting a multilayered film.
CONSTITUTION: Materials which differ in refractive index to X rays are laminated alternately and the thickness of the respective layers is so adjusted that reflected waves in their borders increase their intensity mutually, thus obtaining the X-ray reflecting mirror with the high reflection factor. Here, nickel 2 is used for the low-refractive-index layer on a substrate 1 and the material 4 which contains lithium as its base is used for the high-refractive-index layer to form the multilayered film; and a protection film 5 is formed at the outermost part. Then when lithium 4', lithium hydride 4", or lithium oxide 4''' is used as the material 4, the multilayered film reflecting film for an optical element which has a large reflection factor in the wavelength range of soft X rays is obtained.
| JPH01307221 | X-RAY ALIGNER |
| JP2012063191 | X-RAY FILTER AND X-RAY FILTER APPARATUS |
ETO KAZUYUKI
ITO KAZUHIKO
| JPS63273099A | 1988-11-10 | |||
| JPS6481907A | 1989-03-28 | |||
| JPS6481908A | 1989-03-28 | |||
| JPS6481909A | 1989-03-28 | |||
| JPS6481910A | 1989-03-28 | |||
| JPS6481911A | 1989-03-28 |