Title:
MULTIPLE TIPS FIELD EFFECT ELECTRON-EMITTING ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3895796
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To evenly emit electrons by selectively etching a titanium-based adhesive layer make tips to spring up tip, based on the internal stress of tungsten itself.
SOLUTION: After a titanium adhesive layer 12 is formed on a substrate 11 and a cathode 12 is formed, an Al layer is formed and etched to form a mask 14' for forming multiple- micro-tips and the tungsten cathode 13 is radially etched using the mask 14' to form a triangular multiple- micro-tip shape. Then, after an insulating layer 15 and a gate layer are formed on the substrate, a gate 16' is formed. The layer 15 in the lower part of an aperture 18 of the gate 16' is etched to form a hole 19. Next, the layer 12 is selectively etched to form multiple- micro-tips and obtain an element. At that time, the etching speed of the layer 12 is made extremely high and etching is completed within a short time, so that the tips which are multi-divided into triangular shapes is formed so as to spring up by the internal stress of tungsten.
Inventors:
Gold broth
Application Number:
JP2710296A
Publication Date:
March 22, 2007
Filing Date:
February 14, 1996
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
H01J9/02; H01J1/30; H01J1/304; (IPC1-7): H01J1/30; H01J9/02
Domestic Patent References:
| JP7073800A | ||||
| JP4284327A | ||||
| JP5234522A | ||||
| JP4056040A |
Attorney, Agent or Firm:
Mikio Hatta
Atsushi Nogami
Atsushi Nogami
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