Title:
【発明の名称】金属の選択堆積方法及びその装置
Document Type and Number:
Japanese Patent JP2553590
Kind Code:
B2
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Inventors:
MATSUSHITA YOSHISHIGE
FUKUMOTO KENJI
YAMAGUCHI YOSHIO
FUKUMOTO KENJI
YAMAGUCHI YOSHIO
Application Number:
JP26678787A
Publication Date:
November 13, 1996
Filing Date:
October 21, 1987
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/205; C23C16/02; C23F4/00; H01L21/28; H01L21/285; (IPC1-7): H01L21/285; C23F4/00
Domestic Patent References:
| JP6211227A | ||||
| JP6053013A | ||||
| JP62107062A | ||||
| JP6088540U |
Attorney, Agent or Firm:
Tomoyuki Takimoto