Title:
【発明の名称】基板洗浄装置
Document Type and Number:
Japanese Patent JP2541359
Kind Code:
B2
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Inventors:
SUGINO SHIGEYUKI
KISA TOSHIMASA
OGAWA TSUTOMU
KISA TOSHIMASA
OGAWA TSUTOMU
Application Number:
JP31457390A
Publication Date:
October 09, 1996
Filing Date:
November 20, 1990
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/304; H01L21/302; H01L21/306; (IPC1-7): H01L21/304; H01L21/306
Domestic Patent References:
| JP59195831A | ||||
| JP5814535A | ||||
| JP1208835A | ||||
| JP2148727A |
Attorney, Agent or Firm:
Teiichi