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Patent Searching and Data


Title:
MANUFACTURE OF FILM-CARRIER SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0529401
Kind Code:
A
Abstract:

PURPOSE: To prevent a drop in the reliability of a connection and a drop in a production yield by a method wherein a thermocompression-bonding jig whose tip shape is in a recessed shape is used and an inner-lead bonding operation is executed repeatedly.

CONSTITUTION: An inner-lead bonding operation is executed to bumps 2 on two opposite sides out of four sides on an IC and to inner leads 3. Then, a thermocompression-bonding jig 42 or a bonding stage part which fixes a film carrier tape including the IC and the inner leads 3 s turned by 90°; after that, the inner-lead bonding operation is executed to bumps 2 on two remaining sides on the IC and to inner leads 3. The thermocompression-bonding jig 42 comes into contact with the surface of the inner leads 3 during the inner-lead bonding operation. Even when the bumps 2 and the inner leads 3 are deformed in the transverse direction due to the heat and the load of the thermocompression-bonding jig 42, the deformation in the transverse direction of the bumps 2 and the inner leads 3 is controlled so as to be a minimum because the tip shape of the thermocompression-bonding jig 42 is of recessed structure. Thereby, it is possible to prevent a drop in the reliability of a connection and in a production yield.


Inventors:
YAMASHITA TSUTOMU
Application Number:
JP18600691A
Publication Date:
February 05, 1993
Filing Date:
July 25, 1991
Export Citation:
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Assignee:
NEC CORP
International Classes:
H01L21/60; H01L21/603; (IPC1-7): H01L21/60; H01L21/603
Attorney, Agent or Firm:
Uchihara Shin