Title:
【発明の名称】硬脆材料の研磨方法
Document Type and Number:
Japanese Patent JP2555000
Kind Code:
B2
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Inventors:
NAKAMURA MASARU
TOMITA YOJI
SATO KAN
TOMITA YOJI
SATO KAN
Application Number:
JP1013089A
Publication Date:
November 20, 1996
Filing Date:
January 18, 1989
Export Citation:
Assignee:
KANEBO LTD
International Classes:
B24B7/17; B24B7/22; (IPC1-7): B24B7/17; B24B7/22
Domestic Patent References:
| JP61214976A | ||||
| JP63150162A |