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Title:
【発明の名称】表面処理装置
Document Type and Number:
Japanese Patent JP3060394
Kind Code:
B2
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Inventors:
Kenji Sugimoto
Takahiro Hirao
Application Number:
JP10887592A
Publication Date:
July 10, 2000
Filing Date:
March 31, 1992
Export Citation:
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Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/306; H01L21/67; H01L21/68; (IPC1-7): H01L21/68; H01L21/306
Domestic Patent References:
JP63111637A
JP63208223A
JP63289828A
JP6313344A
JP6320437U
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)



 
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