Title:
【発明の名称】カラーフィルタの欠陥検査装置
Document Type and Number:
Japanese Patent JP3091803
Kind Code:
B2
Inventors:
Koji Machida
Katsunori Nakajima
Katsunori Nakajima
Application Number:
JP5240893A
Publication Date:
September 25, 2000
Filing Date:
March 12, 1993
Export Citation:
Assignee:
Lasertec Co., Ltd.
International Classes:
G01B11/30; G01J1/04; G01N21/88; G01N21/952; G02B26/10; (IPC1-7): G02B26/10; G01J1/04
Domestic Patent References:
| JP344616A | ||||
| JP5674218A |
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)